QARTZ
Feilihua
公司簡介Corporate Introduction
湖北菲利華石英玻璃股份有限公司坐落在中國歷史文化名城湖北省荊州市,公司主要從事高性能石英玻璃、石英纖維及復(fù)合材料的研發(fā)生產(chǎn),主要服務(wù)于半導(dǎo)體、光通訊、光伏太陽能、高端光學(xué)及航空航天等高新技術(shù)領(lǐng)域,是中國率先通過集成電路芯片準入資格認證的石英材料供應(yīng)商,也是全球少數(shù)幾家具有石英纖維批量生產(chǎn)能力的企業(yè)。
公司始建于1966年,2014年在深圳證券交易所創(chuàng)業(yè)板掛牌上市,是中國石英行業(yè)第一家上市公司(股票代碼300395),現(xiàn)擁有荊州、潛江、上海、合肥、泰州、濟南六個生產(chǎn)基地以及荊州、武漢和上海三大研發(fā)平臺。
公司堅守“專注誠信創(chuàng)新進取”的核心價值觀,致力于為全球客戶提供高性能石英產(chǎn)品的整體解決方案,成為石英科技創(chuàng)新的引領(lǐng)者。
公司已通過ISO9001、ISO14001和OHSAS18001體系認證,現(xiàn)為國家級企業(yè)技術(shù)中心、湖北省高性能石英玻璃及石英纖維工程技術(shù)研究中心、湖北省博士后產(chǎn)業(yè)基地、全國第五批創(chuàng)新型試點企業(yè)。
Beingcommitedtotheproductionandsalesof high-performancequartzmaterial,quartzfiberand fabricswhichismainlyusedforsemiconductoropticalcommunication,aviationandaerospaceoptics andotherfields,HubeiFeilihua QuartzGlassCo.,Ltdhasnowbecomemoreinfluentialandscale advantageasquartz glassmaterialand quartzfiber manufacturer bothat homeand abroad.
Foundedin1966,HubeiFeilihua QuartzGlassCo.,LtdwaslistedonGEM(GrowthEnterpriseMarket) onSeptember10th,2014,withstock code300395.Now ithassixmanufacturing bases in Jingzhou, Qianjiang,Shanghai,Hefe,Taixing,JinanaswellasShanghaiTechnicalResearch InstituteandWuhan ResearchandDevelopmentCenter.
Certifiedby ISO9001,ISO14001,OHSAS18001,F(xiàn)eilihuanow becomes thenational high-tech enterprise,memberof national technicalcommiteeof standardizationof industrial glassand special glass,enterprise technologycenterof Hubei province,technical researchcenterof Hubei highperformance quartz glassandquartz fiber project,postdoctoral industry base of Hubei province, national innovationpilotenterprise.
Feilihuastickstothecorevalueof“Absorption,Integrity,Innovation,Enterprising”andtakes“The riseof Chinese quartz”as its own mission,strives for the realization of corporate vision“Building Feilihuaascentury-oldbrand,tobeaworld-leadingenterprise”
eilihua
企業(yè)文化 Corporate Culture
核心價值觀:
Company Core Value 專注誠信創(chuàng)新進取 Absorption Integrity Innovation Enterprising
使命:
致力于為全球客戶提供高性能石英產(chǎn)品的整體解決方案, 成為石英科技創(chuàng)新的引領(lǐng)者。 Tobealeader inquartztechnology innovation,committedto provideoverall solutionsof highperformance quartz products forour global customers.
Mission
愿景:
理念:
Vision
打造百年菲利華品牌,做國際一流企業(yè)。
BuildingFeilihuaascentury-oldbrand,tobeaworld-leadingenterprise.
Concept 共創(chuàng)共享共贏 Co-create Sharing Win-win
股票代碼:300395
Feilihua
企業(yè)管理方針Enterprise Management Policy
質(zhì)量方針QualityPolicy
科學(xué)管理快速反應(yīng)持續(xù)改善顧客滿意Scientific Management Rapid Response Continuous lmprovement Customer Satisfaction
環(huán)境方針EnvironmentPolicy
以不斷的技術(shù)進步和嚴格的管理提高產(chǎn)品品質(zhì)和服務(wù)的同時,注重環(huán)保、節(jié)能的社會責(zé)任,始終堅持健康,持續(xù)的發(fā)展方向。
Wekeepon improving the qualityof products&services by constant technical progressand strict management,and inthemeanwhile takeoursocial responsibilitiesonenvironmental protectionand energysavingaimingathealthyandsustainabledevelopment.
職業(yè)健康方針Occupational HealthPolicy
以遵章守法為基礎(chǔ),堅持“安全第一、綜合治理”的原則,持續(xù)改進職業(yè)健康安全工作,創(chuàng)建和諧企業(yè)。
Beingdisciplined&law-abiding,wedevoteon improving theconditions foroccupational safetyand healthandaharmoniousenterprisewiththeprincipleof"SafetyFirst,Comprehensive treatment".
一流的檢測設(shè)備 完善的管理體系
First-classTestingEquipment Complete ManagementSystem
股票代碼:300395
Feilihua 石英事業(yè)部簡介 Quartz Business Unit Introduction
石英事業(yè)部主要從事半導(dǎo)體及光學(xué)用石英材料的研發(fā)、生產(chǎn)、銷售和服務(wù),致力于為全球客戶提供滿意的石英產(chǎn)品解決方案。主導(dǎo)產(chǎn)品為氣煉、電熔法生產(chǎn)的天然與合成石英玻璃錠、筒、管、棒。近年來成功研制不透明、低羥基、高純少氣泡、低膨脹石英等多品類多應(yīng)用領(lǐng)域的產(chǎn)品,全力滿足高、低端市場需求。
在半導(dǎo)體領(lǐng)域,我們聚焦前端制程的高端石英材料的產(chǎn)品升級,推動刻蝕材料、火加工高純、超高純石英和無機非金屬新材料的開發(fā),突破了從天然石英到合成石英的技術(shù)壁壘,以技術(shù)迭代升級為客戶提供可定制化的材料供應(yīng)。我們是國內(nèi)首家通過全球三大半導(dǎo)體設(shè)備供應(yīng)商認證的企業(yè),品質(zhì)技術(shù)實力達到全球第一梯隊。
在光學(xué)領(lǐng)域,我們圍繞光掩膜基板領(lǐng)域產(chǎn)品升級,持續(xù)推進高性能(高均勻性、低膨脹)合成石英研發(fā)。我們突破TFT-LCD超大規(guī)格光掩膜基板材料(G10.5代)的生產(chǎn)制造技術(shù),增強我國光電子平板顯示產(chǎn)業(yè)可持續(xù)發(fā)展能力。
合成材料工廠Synthetic Material Factory電熔材料工廠Electric Material Factory
TheQuartzDivision ismainlyengaged intheresearchanddevelopment,production,salesandserviceof quartzmaterialsforsemiconductorsandoptics,and iscommitedtoprovidingsatisfactoryquartzproduct solutions for globalcustomers.Themainproductsarenatural quartzproducedbyflame fused orelectric fusedandsyntheticquartzingots,cylinders,tubesandrods.Inrecentyears,manykindsof productswith multi-application fieldssuchasopaque,low hydroxyl,high purity-lowbubbleand lowexpansionquartz have beensuccessfullydeveloped tomeet the needsof highand low-end market.
Inthefieldofsemiconductors,we focusonthe productupgradeof high-end quartzmaterials inthe frontendprocess,promotethedevelopmentofetchingmaterials,fire-processed high-purity,ultra-high-purity quartzandinorganicnon-metallcnewmaterials,breakthroughthetechnicalbariersfromnaturalquartzto syntheticquartz,and providecustomerswithcustomizedmaterial supply throughtechnological iterative upgrades.Weare thefirst enterpriseinChina topassthecertificationof theworld'sthreemajor semiconductor equipment suppliers,and thequalityandtechnical strength has reached theworld'sfirst echelon.
Inthefieldofoptics,we continue topromote theresearchand developmentof high-performance(high uniformity,low expansion)synthetic quartz around the product upgrades in the field of photomask substrate.We break through the manufacturing technology of TFT-LCDsuper-large photomask substrate material(G10.5),andenhance thesustainabledevelopmentabilityof China'soptoelectronicflatpanel display industry.
Feilihua
半導(dǎo)體領(lǐng)域Semiconductorfield
股票代碼:300395
| 工艺 Technology | 型号 | 材科白录 材质 Material Quality | Quartz Glass Material Content 特点 | |
| Flame Fused Quartz 气熔石英材料(锭、筒) | Type FLH311 | Features 天然石英锭,采用气炼工艺制造, Natural quartz ingotmadebyflame fusion process, | ||
| 气泡少,具有良好的透明度和几何尺寸, 材料利用率高。 | lessbubble,hightransparencyand good geometry,optimumrateof utilization. | |||
| FLH21 | 透明石英 | |||
| Transparent 几乎无气泡、超高纯、低碱低铝,几乎无包裹物、 | Almostbubblefree,ultra-highpurity,lowalkali and | |||
| FLH321HS | 耐高温性能强,是理想的视窗材料。 挪威砂材料,更高纯度,采用气炼工艺制造, | lowaluminum,almostnowrapping,stronghigh mmperatureresistanceitisanidealwindow Norwegiansandmaterial,madebyflamefusion | ||
| FLH321N | 气泡少,具有良好的透明度和几何尺寸, 材料利用率高。 不英 | process,lessbubble,hightransparencyandgood geometry,optimumrateofutiization. | ||
| FLHO321N | Big total surfacearea of bubbles per unit volume. | |||
| 电熔石英材料(键) 筒、 管、 棒) 8 | FLH621 | 透明石英 Transparent Quartz | 天然高石1定,采用电熔工艺, | i |
| FLH621S | 高纯石1电熔工艺,气泡少。 | |||
| FLH621H | 天1英在用高,H含量 | |||
| FLH620L | 采用电连熔工艺生产的更高纯度的石英管, 偏壁度0.3mm以内。OH含量少于30ppm。 | Thetubeisproducedbyelectric fusedcontinuous | ||
| FLH610L | 采用电连熔工艺生产,偏壁0.5mm以内。 | |||
| FSTQZ°W | 拥有高反射率,是一种理想的隔热材料, 可以有效地降低热损失, 并能延长加热部件的寿命。 | Withhigheflectivityitisanidealthermalinsulation materialtoeffectivelyreduceheat lossandextend | ||
| FSTQZ°B | 不透明石英 复 | 可同时拥有高光学吸收率、高发射率以及低热导率。 此外,相较于其他黑色陶瓷其加工性能更优。 | emissivityand lowthermalconductivity.Comparedwith otherblackceramics,itsprocessngperformanceis superior. | |
| FCMQZ | 高能度,面光洁度,耐高温良好的隔热保温 | |||
| 石 料 盛 | FLH301 | 透明石 | 有的,眼可见气泡, | reel |
| FLH331 | ,无 | Exeey | ||
| FLH631 | 高纯石2用合成砂电熔工艺熔制,气泡少。 | |||
Feilihua 氣熔透明石英 Flame Fused Quartz FLH311 FLH321 FLH321N FLH321H FLH321HS
氣泡少,具有良好的透明度和幾何尺寸。
廣泛應(yīng)用于半導(dǎo)體、光纖、太陽能光伏、光學(xué)鍍膜等領(lǐng)域。
Thematerialhasfewbubble initwithexcellent transparencyandgeometricdimension.Theyarewidely usedforsemiconductor,OpticalFiber,SolarEnergy& Photovoltaics,Optical Coating/Filming.
氣熔高純少氣泡石英材料,具有氣泡少、純度高,幾乎無包裹物、耐高溫性能等特性,廣泛的應(yīng)用于半導(dǎo)體先進制程、光學(xué)、化學(xué)加工、紫外線和高溫窗口等。
Thanks to the few bubbles,high purity,almost no inclusion,high temperature resistant performance and other characteristics,FLH321HS has been widely used in semiconductor advanced manufacturing,optical,chemical processing,UVand high temperature window.
股票代碼:300395
化學(xué)純度
Chemical Impurity
物理性能
Physical Property
| 机械性能MechanicalProperties | 电学性能Electrical Properties | 热学性能ThermalProperties | |||
| 密度(g/m²) | 2.2 | 介电etrcConstnt (10GHz) | 3.74 | 应变P(in=1014.5) °C | 1080 |
| 杨氏模量(GPa) Young's Modulus | 74 | 介电损耗 Loss Factor(10GHz) | 0.0002 | 退火点(n=10)°℃ Annealingpoint | 1180 |
| 泊松比 Poisson'sRation | 0.16 | 介电强度(V/m) Dislectric Strength | 3.7×10 | 软化点²(η=107)℃ Softening point | 1700 |
| 抗弯强度(MPa) Bending Strength | 65 | 电阻率(Ω) Resistivity (20℃) | 1× 1016 | 热导率(W/m·k)在20℃条件下 Thermal Conductivity (20℃) | 1.4 |
| 抗压强度"(MPa) Compressive Strength | 1100 | 比热(J/kg·k)在20℃条件下 Specific Heat(20℃) | |||
| 抗拉强度(MPa) Tensile Strength | 50 | 热膨胀系数(×10/k) Expansion Coefficient | 5.5 | ||
| 抗扭强度"(MPa) Torsional Strength | 30 | 弯曲和拉伸强度受表面条件的影响 2由外推法估计得到 | α:20℃~320°℃ | ||
| 莫氏硬Hardness | 6-7 | 注有另外说明的情况下,所有值均指在25℃以下 | |||
Feilihua
氣熔不透明石英 Flame Opaque Quartz
FLHO321H
FLHO321N
化學(xué)性能
Chemical property
| 10%HF溶液,25℃,腐蚀3小时 Solution:HF10wt%,25℃,Etchingtime:3hours | 10%KOH溶液,20℃,腐蚀72小时 Solution:KOH10wt%,20℃,Etching time:72hours | ||
| 火焰抛光表面(um/min) Firepolished surface | 磨光表面(um/min) Ground surface | 火焰抛光表面(um/min) Firepolishedsurface | 磨光表面(um/min) Ground surface |
| 0.07 | 0.1 | 0.002 | 0.005 |
主要用途:
單位體積內(nèi)氣泡總表面積大,能增加熱輻射線在石英玻璃內(nèi)的散射,從而提高熱輻射攔阻能力,廣泛用于半導(dǎo)體、太陽能各種石英器件的隔熱部位。
Mainapplication:
Thanksto the big total surface area of bubbles per unit volume,it can increase the reflection of heat rays in the quartz glass,which improves itsabilityto intercept heat rays.It is wildly used in heat insulation parts of various quartz devices such as semiconductors and solar energy.
股票代碼:300395
化學(xué)純度
Chemical Impurity
光學(xué)性能
Optical properties
氣熔不透明石英FLHO321N反射率
物理性能
Physical Property
| FLHO321N | FLHO321H | |
| 机械性能Mechanical Properties | ||
| 密度(ρ)" Density(ρ) | 2.05g/cm² | 2.05 g/cm³ |
| 抗弯强度(MPa) Bending Strength | 60 | 60 |
| 维氏硬度(MPa) Vickers Hardness | 8900 | 8900 |
| 电学性能Electrical Properties | ||
| 介电 (10GHz) | 3.74 | 3.74 |
| 介电损耗(500MHz) Loss Factor | ||
| 热学性能ThermalProperties | ||
| 热导率(W/m·k)在20℃条件下 Thermal Conductivity (20°℃) | 1.24 | 1.24 |
| 比热(J/kg·k)在20℃条件下 Specific Heat(20℃) | 749 | 749 |
| 热扩散率(×10-7m/s)在20℃条件下 Diffusivity (20℃) | 8.4 | 8.4 |
| 粘度logn(平衡状态)在1200℃条件下 Viscosity (1200℃) | 11.72 | 11.72 |
| 软化点(℃) Softening point | 1670 | 1670 |
| 退火点(℃) Annealing point | 1150 | 1150 |
| 应变点(℃) Strain Point | 1070 | 1070 |
| 热膨胀系数(x10-/k) α:30°℃~600℃ Expansion Coefficient | 6.4 | 6.4 |
股票代碼:300395
Feilihua 電熔石英 Electric Fused Quartz FLH621 FLH621H FLH620L FLH621S
電熔石英材料,具有羥基含量低、純度高、耐高溫性能強等特性。廣泛應(yīng)用于半導(dǎo)體行業(yè)作為半導(dǎo)體擴散爐及CVD爐元件的材料。
注:可根據(jù)客戶要求,定制規(guī)格產(chǎn)品。Othersizesavailableuponrequests 電熔石英管 Electric Fused Quartz Tube
Electric fusedquartzmaterial hascharacteristicssuchaslow OH content,high purity,and strong high-temperature resistance. Itiswidelyusedas quartz parts fordiffusion processand CvD furnace in semiconductor industry.
電熔無氣泡石英Low hydroxyl and low bubble quartz超低氣泡含量的優(yōu)勢,在熱學(xué)、光學(xué)性能方面表現(xiàn)優(yōu)異,在半導(dǎo)體、光學(xué)等高端領(lǐng)域應(yīng)用廣泛。
Ultra-lowbubble content,excellent performance in thermal and optical properties,it is widely applied in the high-end field of semiconductor and optics.
物理性能
Physical Property
| 机械性能MechanicalProperties | 电学性能Electrical Properties | 热学性能Thermal Properties | |||
| 密度(g/m²) | 2.2 | 介电e常t ((10GHz) | 3.74 | 应点(t | 1150 |
| 杨氏模量(GPa) Young's Modulus | 75 | 介电损耗 LossFactor(500MHz) | 退火点(℃) Annealing point | 1215 | |
| 泊松比 Poisson'sRation | 0.17 | 电阻率(Ω·m) Resistivity(20℃) | 1 × 1016 | 软化点2(℃) Softening point | 1710 |
| 抗弯强度(MPa) Bending Strength | 65-95 | 热导率(W/m·k)在20℃条件下 ThermalConductivity(20℃) | 1.38 | ||
| 抗压强度(MPa) Compressive Strength | 1100 | 比热(J/kg·k)在20℃条件下 Specific Heat(20℃) | 749 | ||
| 抗拉s强度(MPa) 抗扭强度"(MPa) | 50 | 热膨胀系数(x107/k) α:20℃~320°℃ | 5.2~5.8 | ||
| Torsional Strength 莫氏硬度 | 30 | 弯曲和拉伸强度受表面条件的影响 2由外推法估计得到 注意: | |||
雜質(zhì)含量
| 杂质元素含量 ImpurityTypicalValue | |||||||||||||||
| 元素 牌号 | AI | B | Ca | Co | Zr | Cu | Fe | K | Li | Mg | Mn | Na | Ni | Ti | OH |
| FLH620L | 13 | 0.1 | 0.6 | 0.1 | 1 | 0.05 | 0.3 | 0.2 | 0.4 | 0.05 | 0.05 | 0.2 | 0.05 | 1.30 | |
| FLH621 | 12.8 | 0.05 | 0.5 | 0.01 | 1 | 0.01 | 0.3 | 0.25 | 0.3 | 0.05 | 0.05 | 0.5 | 0.05 | 1.25 | ≤15 |
| FLH621H | 8.00 | 0.05 | 0.5 | 0.01 | 0.7 | 0.01 | 0.3 | 0.1 | 0.15 | 0.05 | 0.05 | 0.2 | 0.05 | 1.40 | ≤15 |
| FLH621S | 12 | 0.8 | 一 | 0.4 | 0.2 | 0.9 | 0.15 | 0.5 | 0.6 | ~10 | |||||
股票代碼:300395
光學(xué)性能
Optical properties
紫外透過率曲線Ultraviolet Transmittance Curve
Feilihua
FSTQZW 電熔不透明石英 (白)
Sintered Fused Opaque Quartz電熔不透明石英玻璃擁有低透過率,高熱反射率,可以有效地降低熱損失,并能延長加熱部件的壽命。該材料可以進行焊接、火拋光以及高精度光學(xué)拋光處理,擁有高密度,優(yōu)異的機加光潔度,火拋后良好的光潔度,更長的使用壽命。適用于半導(dǎo)體熱處理制程。
Electric fused opaque quartz glass has high reflectivity,which can effectively reduce heat loss and can extend the lifespan of heating parts. Thematerial can be welded,fire-polished,and high-precision optical polished,and can be used for semiconductor processes with its high purity.
Feilihua
FSTQZ?B 電熔不透明石英 (黑)
BlackQuartz
黑色石英玻璃材料同時具備高純度、高光學(xué)吸收率、高發(fā)射率以及低熱導(dǎo)率,因此可提高工藝環(huán)境的熱均勻性,屏蔽過程中向外輻射熱量,從而增加熱管理的自由度。此外,較其他黑色陶瓷其加工性能更優(yōu)。
Black quartz glass material has high purity,high optical absorption,highemissivity,and lowthermal conductivityatthe same time,so it can improve the thermal uniformity of the process environmentand shield the heatradiated outward during the process,thus increasing the freedomof thermal management.In addition,it has better processing properties than other black ceramics.
股票代碼:300395
雜質(zhì)含量
Chemical purity
物理 性能
Physical properties
| FSTQZW | FSTQZB | |
| 密度 (g/m³) | 2.15-2.18 | 2.19-2.20 |
| 孔隙率 Porosity | 1.3%-2.7% | 0.3%-0.8% |
| 孔径size | ||
| 线膨胀系数(0-900℃)108℃ | 0.45 | 0.60 |
| 比热i(/He)在20C条件下 | 0.75 | 0.73 |
| 最高工作温度的inuous℃C | 1100 | 1150 |
| 最高工作温度ture-short termC | 1300 | 1300 |
| 介电损耗角室温13.56MHz Dielectric loss (room temperature) | 2×10-4 | 90×10-4 |
| 热h率a(W/mu.kvi在20℃C条件下 | 1.39 | 1.65 |
光學(xué)性能
Optical properties
| FSTQZRW | FSTQZRB | |
| 透过率Transmission (400-2000nm) | ||
| 反4射率-220otivity | >70% | |
| 发射率Emissivity (10-20μm) | >80% |
股票代碼:300395
Feilihua 復(fù)合石英 CompositeQuartzMaterial FCMQZ
中間層為FSTQZ°W高純白色不透明石英材料,保留了其出色的隔熱性能;
兩側(cè)為半導(dǎo)體級透明石英材料,高溫區(qū)使用規(guī)避了乳白材料顆粒脫落的風(fēng)險,穩(wěn)定性更高;
復(fù)合層熔融結(jié)合,無空穴,具有出色的冷熱加工性能,作為隔熱和保溫材料應(yīng)用于晶圓制程中。
透明層可根據(jù)客戶需求定制:FLH321、FLH321H、FLH621、FLH621H、FLH301等。
The middle layer is FSTQZ@W high purityopaque quartz material,which remains its excellent thermal insulation property.Both sidesare semiconductor grade transparent quartz material,which canavoid the risk of opaque material particle fallingoffat high temperature usage and provide higher stability.Thecomposite layersare fused togetherand void free,withexcelent cold and hot processing properties.It is usedas thermal insulation material in wafer fabrication process.The transparent layer can be customized according to customer requirements: FLH321,FLH321H,FLH621,FLH621H,FLH301,etc.
化學(xué)純度
Chemical Impurity
| 牌号 Type | 杂质元素平均值 TypicalMeanValue | 单位Unit:ppm | |||||||||||||
| AI | Ca | Mg | Cu | Fe | Ni | Li | Na | K | Zr | Ti | Mn | B | Co | 合计 | |
| (FSTQZ) | 13 | 1.2 | 0.1 | 0.05 | 0.5 | 0.05 | 0.4 | 1.2 | 0.5 | 1.7 | 1.5 | 0.05 | 0.1 | 一 | 20.35 |
| 透明层 (FLH621) | 12.8 | 0.5 | 0.05 | 0.01 | 0.3 | 0.05 | 0.3 | 0.5 | 0.25 | 1.25 | 0.05 | 0.05 | 一 | 17.12 | |
光學(xué)性能
Optical properties
FCMQZ保留了FSTQZW 較低的紅外透過率( < 0 . 5 % 和較高的紅外反射率( > 7 0 % 0
FCMQZ material retains the low transmittanceand high reflectivity properties of FSTQZ?W material.
單位Unit:mm
| 产品 Product | 类型 Type | 长度/直径 Length/OD | 宽度 Width | 高度/厚度 Height/Thickness |
| FSTQZ°W FSTQZ°B | 碗芯 | 460 | 30 | |
| 正方板 | 500 | 500 | 30 | |
| 长方条 | 800 | 250 | 60 | |
| 圆环 | 580 | 365 | 130 | |
| FCMQZ | 圆片 | 340 | 0.75+2+0.75 1+4+1 0.75+2+3.25 |
股票代碼:300395
Feilihua
多孔石英
Porousquartz filterelement
FPQZ
多孔石英過濾芯,用于氣體勻流、緩沖、半導(dǎo)體擴散。
具有孔隙率高、垂直度良好和規(guī)格尺寸多樣化的優(yōu)勢。
在氣體、液體過濾領(lǐng)域具有良好的應(yīng)用。
The porous quartz filter element used for gas homogenization,buffering and semiconductor diffusion possesses high porosity, good perpendicularityand diversified specifications.With the aboveadvantages,it is widelyapplied in the field of gasand liquid filtration.
Feilihua
合成石英
Synthetic Quartz FLH301以四氯化硅( S i C l _ { 4 } . )為原料,采用化學(xué)氣相沉積(CVD)工藝熔制的高純合成石英玻璃經(jīng)過二次電熔熱改型及機械加工生產(chǎn)的外形為規(guī)則圓柱體的石英玻璃錠、石英玻璃筒/環(huán)及制品。廣泛應(yīng)用于半導(dǎo)體先進制程及精密光學(xué)領(lǐng)域
High purity synthetic quartz glass melted by chemical vapor deposition (CVD)processand silicon tetrachloride (SiCl)as rawmaterial,quartz glass ingot,quartz glasscylinder/ring and its products with regular shape are produced through secondary,electric melting heat modificationand mechanical processing.Widely used in advanced semiconductor processes and precision optics.
化學(xué)純度
Chemical Impurity
| 杂质元素典型值 ImpurityTypical Value 单位Unit:ppm | |||||||||||||||
| 牌号 | Al | B | Ca | Co | Cu | Fe | K | Li | Mg | Mn | Na | Ni | Ti | Zr | 总量 |
| FLH301 | ≤0.02 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.02 | ≤0.01 | ≤0.01 | ≤0.01 | 1 |
外觀指標
Appearance
| 项目 Item | 指标Index |
| 气泡 Bubble | (或100倍以上高倍镜检测无直径气泡度0.03mm以上气泡)。 No visible bubblestothe naked eye. |
| 200nm透过率 200nmTransmittance | ≥85% |
| 外观颜色 AppearanceColor | 外表面颜色均匀,无杂色;涂红油后内部无色透明。 Theoutersurfacecolorisuniform,withoutanyimpurities,andthe interior iscolorlessand transparentafterbeingcoatedwithredoil. |
| 表面污染物 Surface Contaminants | 无有毒有害残渣 Notoxic orharmful residues. |
股票代碼:300395
紫外光譜透 過性能
UV spectral transmittance
公 泡及異物情況
Bubbles and inclusions
| 气泡及异物数量(100g玻璃中允许) Theallowablenumberofbubblesand foreignmatterper1oogof glass | ||||||||||
| 类别 Category | 气泡直径(mm)及个数 Thediameter(mm)andnumberof bubbles | 异物的直径(mm)及个数 Thediameter(mm)andnumberof transparent oropaque impurities | ||||||||
| 0.03~0.30 | 0.31~0.70 | >0.7 | 总数个 | 0.3~0.7 | 0.8~1.0 | 1.1~3.0 | 1.1~3.0 | |||
| 数量 Number | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | ||
Feilihua
電熔合成砂石英FLH631
Electrofusion High-Purity Low-Bubble Quartz
FLH631是由合成石英砂制成的電熔高純少氣泡石英產(chǎn)品,具有純度高、少氣泡、羥基含量低、耐高溫等特性,可用于半導(dǎo)體、光學(xué)、化學(xué)加工、紫外線和高溫窗口等。
FLH-631is an electro-melted high-purity, low-bubble quartz product made from synthetic silica sand.It features high purity, low bubble content,low hydroxyl content,andhigh-temperatureresistance,makingit suitable forapplications in semiconductors,optics, chemical processing,ultravioletand high-temperature windows,among others.
雜質(zhì)含量
Chemical purity
| 杂质元素典型值ImpurityTypicalValue (ppm) | ||||||||||||||
| 牌号 | AI | B | Ca | Co | Cu | Fe | K | Li | Mg | Mn | Na | Ni | Ti | OH |
| FLH631 | 0.15 | 0.2 | 0.15 | 0.05 | 0.2 | 1-20 | ||||||||
光學(xué)性能
Optical properties
紫外透過率曲線Ultraviolet Transmittance Curve
股票代碼:300395
物理性能
Physical Property
| 机械性能MechanicalProperties | 电学性能Electrical Properties | 热学性能ThermalProperties | |||
| 密度(g/m²) | 2.2 | Die电常tConstant (10GHz) | 3.7 | 应点P(n=10145) C | 1070 |
| 杨un模量(GPa) | 74 | 电s损ator (10GHz) | 0.0002 | 退火点(n=10°)℃ | 1150 |
| 泊松比 Poisson's Ration | 0.17 | 电阻率(Ω) Resistivity(20℃) | 1×1016 | 软化点²(n=107)℃ Softening point | 1670 |
| 抗弯强度"(MPa) Bending Strength | 65 | 热导率(W/m·k)在20℃条件下 Thermal Conductivity(20℃) | 1.24 | ||
| 抗压强度"(MPa) Compressive Strength | 1130 | 比热(J/kg·k)在20℃条件下 Specific Heat(20℃) | 749 | ||
| 抗拉强度"(MPa) Tensile Strength 抗扭强度(MPa) | 49 | 热扩散率(×10-7·m²/s) 在20℃条件下Diffusivity(20℃) | 7.5 | ||
| Torsional Strength 莫氏硬度 | 29 | 弯曲和拉伸强度受表面条件的影响 2由外推法估计得到 | 热膨胀系数(×107/k) ExpansionCoefficient α:20℃~320℃ | 5.2-5.8 | |
透 過 率曲線
Transmittance Curve
Feilihua
氣熔合成砂石英FLH331
Flame Fused High-purityNo-bubble Quartz
FLH331是由合成砂制成的石英材料,具有純度高、少氣泡,無包裹體、透過率高、耐刻蝕、耐高溫等特性,可運用于半導(dǎo)體先進制程、光學(xué)、化學(xué)加工、紫外線和高溫窗口等。
FLH331isaquartz material made of syntheticsand.Thanks tothe highpurity,few bubbles,no inclusions,high transmittance,etching resistance,high temperature resistanceandother characteristics,F(xiàn)LH331could be used in advanced semiconductor manufacturing process,optics,chemical processing,ultraviolet and high temperature windows,etc.
化學(xué)純度
Chemical purity
| 杂质元素典型值 ImpurityTypicalValue (ppm) | ||||||||||||||
| 牌号 | AI | B | Ca | Co | Cu | Fe | K | Li | Mg | Mn | Na | Ni | Ti | OH |
| FLH331 | 0.1 | 0.2 | 0.2 | 0.03 | 0.2 | 150-300 | ||||||||
Feilihua
光學(xué)領(lǐng)域Optical field
股票代碼:300395
Feilihua
有水合成石英 Synthetic Quartz (F-HUV)
以高純度SiCI為原料,采用氫氧焰熔制而成,產(chǎn)品無氣泡,具有良好的光學(xué)性能。廣泛應(yīng)用于高端光學(xué)領(lǐng)域。
The syntheticquartz,melted byhydrogenandoxygen flame withhighpuritySiCl4,hastheexcelentoptical properties and no bubble.It is widely used for advanced optics industry.
光學(xué)特性
Optical property
| 型号 | 条纹 | ( | Fure光性e | wvh | 气泡 | ||
| F-HUV1 | 1D | ≤10nm/cm | None | 190-2100nm | 0级 | 900-1300ppm | |
| F-HUV2 | 1D | ≤10nm/cm | None | 190-2100nm | 0级 | ||
| F-HUV3 | 1D | ≤10nm/cm | None | 190-2100nm | 0级 | ||
| F-HUV4 | 1D | ≤10nm/cm | None | 190-2100nm | 0级 | ||
| F-HUV5 | 1D | ≤10nm/cm | None | 190-2100nm | 0级 | ||
| F-HUV6 | 1D | None | ≤10nm/cm | None | 190-2100nm | 0级 | |
| F-HUV7 | None | None | None | None | 190-2100nm | None |
透過率曲線
光學(xué)均勻性圖譜
Transmittance Curve
檢測設(shè)備:紫外、可見、近紅外分光光度計
Test equipment: Ultraviolet、Visible light、Near infrared spectrphotometer
樣品厚度:10mm
Sample thickness:10mm
Optical Homogeneity Spectrum
光學(xué)參數(shù) Optical Parameters
光學(xué)性能
Optical Properties
| ptoan aracte | |||||||
| 折射率Refractive Index | 折射率Refractive Index | 阿贝数Abbe number | 色散Dispersion | ||||
| n1530 | λ(um) 1.53000 | 1.44426 | nd | 1.45849 | vd | 67.72 | nd-nc |
| n1064 | 1.06400 | 1.44964 | ne | 1.46011 Ve | 67.58 | nf'-nc' | 0.00677 0.00681 |
| nt | 1.01398 | 1.45024 | |||||
| ns | 0.85211 | 1.45246 | 典型的微量元素杂质含量TraceElementTypicalValue(PPM) | ||||
| n708 | 0.7082 | 1.45514 | 微量元素TraceElement 光学级Optical | ||||
| n691 | 0.69075 | 1.45554 | AI ≤0.05 ≤0.02 | ||||
| n672 | 0.67164 | 1.45600 | Na | ||||
| nc | 0.65627 | 1.45642 | Ca | ||||
| nc' | 0.64385 | 1.45678 | ≤0.02 K ≤0.01 | ||||
| nHe-Ne | 0.63299 | 1.45701 | Fe ≤0.005 | ||||
| n623 | 0.62344 | 1.45733 | Ti ≤0.01 | ||||
| nD | 0.58929 | 1.45841 | Cu ≤0.005 | ||||
| nd | 0.58773 | 1.45846 | Cr ≤0.005 | ||||
| n577 | 0.57696 | 1.45886 | Mn ≤0.005 | ||||
| ne | 0.54623 | 1.46007 | |||||
| n492 | 0.49161 | 1.46282 | |||||
| nF | 0.48613 | 1.46312 | |||||
| nF' | 0.47999 | 1.46353 | |||||
| ng | 0.43596 | 1.46669 | 部分色散Partialdispersion 部分色散比率Partialdispersionrate | ||||
| nh | 0.40477 | 1.46962 | nC-nt 0.00613 eC.t | ||||
| ni | 0.36512 | 1.47455 | nc-nA' 0.00248 OC.A' | ||||
| n334 | 0.33415 | 1.47979 | nd-nc 0.00209 0d.c | ||||
| n313 | 0.31266 | 1.48450 | ne-nc 0.00371 0e.C | ||||
| n289 | 0.28936 | 1.49105 | ng-nd 0.00824 θg.d | ||||
| n270 | 0.26988 | 1.49812 | ng-nF 0.00356 | ||||
| 0.25373 | 1.50554 | 0g.F nh-ng 0.00293 | |||||
| n254 | 1.50846 | ni -ng 0h.g ei.g | |||||
| n248 | 0.24800 | 0.00785 e,C.t' | |||||
| n229 | 0.22887 | 1.52121 | nc'-nt 0.00647 | ||||
| n215 | 0.21451 | 1.53378 | ne-nc' 0.00337 | ||||
| n194 | 0.19423 | 1.55896 | nF'-ne 0.00344 | ||||
| n185 | 0.18495 | 1.57511 | ni -nF 0.01104 | ||||
股票代碼:300395
| 折射率Sellmeier色散公式 Refractive IndexSellmerierDispersion Formula | |||||||
| n²-1=A1χ²/(χ²-B²)+A2χ²/(²-B²)+Aχ²/(²-B²)) | |||||||
| Sellmeier色散公式因子 Constants of Sellmeier DiSperision Formula | |||||||
| A1 | 0.6961852 | B1 0.0685886 | |||||
| A² | 0.4079779 | 0.1162043 | |||||
| A3 | 0.8974798 | 9.8961609 | |||||
| 各种折射率温度系数 Various Refractive Index Temperature Constant | |||||||
| 温度范围 (℃) Temperature | 绝对dn/dT(x10/K) Absolute dn/dT | 相对dn/dT(x10/K) Relativedn/dT | |||||
| e g | h | i e | h | i | |||
| (546.1nm) | (435.8nm) | (404.7nm) | (360.0nm) | (546.1nm) | g (435.8nm) | (404.7nm) (360.0nm) | |
| -40~-20 | 7.8 | 8.2 | 8.4 | 8.7 | 9.8 | 10.2 10.5 | 10.8 |
| -20~0 | 8.2 | 8.6 | 8.9 | 9.2 | 9.9 | 10.4 10.7 | 11.0 |
| 0~20 | 8.7 | 9.1 | 9.4 | 9.7 | 10.1 | 10.6 10.9 | 11.2 |
| 20~40 | 9.1 | 9.5 | 9.8 | 10.2 | 10.6 | 10.8 11.1 | 11.5 |
| 40~60 | 9.5 | 9.9 | 10.2 | 10.6 | 10.6 11.1 | 11.4 | 11.7 |
Feilihua 低膨脹石英 Low Expansion Quartz (LEQZ°)
LEQZ超低膨脹石英玻璃口徑超過1米,在室溫區(qū)間下具有近零的熱膨脹系數(shù),零膨點溫度區(qū)域可控。作為精密光路系統(tǒng)的反射鏡、激光諧振腔體等部件應(yīng)用于天基太空望遠鏡、半導(dǎo)體光刻設(shè)備用光學(xué)元件、原子鐘等領(lǐng)域。
Ultra-lowexpansion quartz glass with a diameter of more than 1 meter,It hasanear-zerothermalexpansioncoefficient in theroom temperature range,and the zero expansion point temperature range iscontrollable.Asamirrorof precisionoptical system,laserresonant cavityand other components,itis usedinspace-based space telescopes,optical components for semiconductor lithography equipment,atomic clocksand other fields.
股票代碼:300395
熱 膨脹系數(shù)
Coefficient of Thermal Expansion
熱膨脹系數(shù)低
Near-zero thermal expansion coefficient
可控的零膨點區(qū)間
Controllable zero expansion point interval
CTE均勻性
CTE Homogeneity
①OD660×50mmCTE均勻性(PV)OD660×50mmCTE homogeneity(PV)
②OD950×65mm CTE均勻性 (PV)OD950×65mm CTEhomogeneity(PV)
物理性能
Physical Property
| 项目 | Name of Indicator | LEQZ? |
| 平均线膨胀系数5-30℃(α) | Average LinearCoefficient of Thermal Expansion 5°Cto 35°C(α) | 0 - ±30ppb/℃ |
| 导热系数(K) | Thermal Conductivity (K) | 1.31w/(m· ℃) [1.13 kcal/(m·h· ℃)] |
| 热扩散率(D) | Thermal Diffusivity (D) | 0.0079 cm²/s |
| 体积热阻率200°C,100Hz(R) | D.C.Volume Resistivity, 200° C 100Hz(R) | 1011'ä ohm · cm |
| 平均比热(Cp) | Mean Specific Heat (Cp) | 767 J/(kg·C) [0.183 cal/(g· ℃)] |
| 应变点 | Strain Point | 890℃[1634°F] |
| 退火点 | Annealing Point | 1000 ℃ [1832° F] |
| 软化点 | Softening Point (estimated) | 1490℃ [2714°F] |
| 泊松比(v) | Poisson's Ratio (v) | 0.15 |
| 极限拉伸应力(MOR) | Ultimate Tensile Stress (MOR) | 36.53 MPa [7220 psi] |
| 努氏硬度,200g载荷 | Knoop Hardness,200g load | 518 kg/mm² |
| 密度(p) | Density(p) | 2.21g/cm² [0.079 Ib/in] |
| 比刚度(E/p) | Specific Stiffness (E/ p) | 3.12× 10°m [1.23× 10° in] |
| 剪切模量(G) | Shear Modulus (G) | 28.74 GPa [4.20x 106 psi] |
| 体积模量(K) | Bulk Modulus (K) | 30.71 GPa [4.95 × 106 psi] |
| 弹性模量(E) | Elastic Modulus(E) | 65.6 GPa [9.80 × 106 psi] |
| 应力光学系数 | Stress Optical Coefficient | 5-20 (nm/cm)/(kg/cm²) |
| 折射率(标称CTE材料) | RnomintiveCTE Material) | |
| 阿贝数 | Abb é Number(Vd) | 53.1 |
股票代碼:300395
Feilihua 無水合成石英 Anhydrous Synthetic Quartz (F-HIR)
F-HIR材料,可用作高穩(wěn)定超薄彈性元件、精密異形元件、抗激光損傷窗口等,是高精度慣性加速度計、半球諧振陀螺儀、強激光透鏡(窗口)等器件的優(yōu)選材料。
F-HIR,can be used as high stabilityultra-thin elastic element,precision special-shaped element,anti laserdamagewindow,etc.Itisapreferredmaterial for high precision inertial accelerometer, hemispherical resonator gyroscope,strong laser lens (window)and otherdevices.
| 型号 Type | 羟基含量 Hydroxyl content (ppm) | 光学 均匀性" Optical △n(x10°) | 应力” Stress | 条纹 Streak | 荧光 Fluorescence | 氢浓度 Hydrogen concentration | 适用于 Applicable |
| F-HIR1 | ≤50 | ≤5、≤2、≤1 | 可定制 | 3D | None | / | 光学透镜 |
| F-HIR1L | ≤50 | ≤5、≤2、≤1 | ≤10 可定制 | 3D | None | 5x1016~5x1018 可定制 | 照明光学部件, 耐辐照透镜 |
| F-HIR2 | ≤1 | ≤5、≤2、≤1 | 可定制 | 3D | None | 高精率光部件 | |
| F-HIR2L | ≤1 | ≤5、≤2、≤1 | ≤10 可定制 | 3D | None | 5x101~5×1018 可定制 | KrF、ArF基板、 高功率激光部件 |
| 金属杂质总含量 ImpurityContent | |
| 羟基含量 Hydroxyl content | |
| 温升 Temperature rise | 1.71℃(8000w,150s) |
| 内部透过率 Internal-transmittancerate | 99.93%/cm@193nm 、 99.99%/cm@248nm |
| 外部透过率 External-transmittance rate | ≥90.2%/6.35mm@193nm |
| 弱吸收 Weakabsorption | 0.83ppm@1064nm |
| 热膨胀系数 Coefficientof thermal expansion | |
| 耐辐照性能Laserdurability@193nm: 透过率变化DegradationofTransmission |
透過率曲線
Transmittance Curve
紅外透過率曲線 Infrared Transmittance Curve
股票代碼:300395
光學(xué)均勻性
Optical Homogeneity
氣泡及異物情況
Bubbles and inclusions
| 适用于 Bubble Level | 气泡横截面积总和 Sumofcross-sectionalareasofbubbles | 最大气泡直径 Maximunbubblediameter |
| 1级 | None | None |
| 2级 | ≤0.002mm/100cm? | ≤0.03 |
| 3级 | ≤0.01mm²/100cm³ | ≤0.063 |
| 4级 | ≤0.03mm²/100cm³ | ≤0.1 |
Feilihua
無氯合成石英 Chlorine-free Synthetic Quartz (FNCL)
以有機硅為原料的合成石英玻璃新工藝,較傳統(tǒng)合成石英材料,氯離子含量極低,在應(yīng)用于紫外波段時能夠延長其使用壽命
Feilihua has developed a new process of synthetic quartz glass using organic siliconas raw material, whichis chlorine-free and canextend its service life whenapplied in the uv band.
透 過 率
Transmittance spectral curve
| 金purtyC含量 | |
| 氯含量 Chlorine content | |
| 羟基含量 Hydroxylcontent | 800-1200 ppm |
| 温升 Temperaturerise | 3℃(8000W,1200Hz,150s) |
| 激光损伤阈值(体损伤,355nm) | 16.033J/cm² |
| 量热法弱吸收 Calorimetricweakabsorptioncoefficients | 0.3%-0.5%(193nm) |
股票代碼:300395
單位Unit:mm
| 类型 Type | 规格 erance |
| 第4代、第5代 | 520×610/520×800 |
| 第6代 | 800×920/800×960 |
| 第7代 | 850×1200/850×1400 |
| 第8代 | 1220×1400 |
| 第10代 | 1620×1780 |
Feilihua
石英玻璃產(chǎn)品使用說明 Instructions for quartz usage
1.石英玻璃為易碎品,在搬運、安放過程中應(yīng)注意輕拿輕放。
2.石英玻璃具有極低的熱膨脹性。當與具有不同的熱膨脹系數(shù)材料接觸、被固定或夾住時溫度的快速變化會使石英玻璃破裂。
3.石英玻璃受到污染后,高溫下容易析晶。對于需高溫使用的非免清洗的石英玻璃制品,在使用之前,應(yīng)進行清洗,清洗應(yīng)采用這樣的方式:將石英玻璃產(chǎn)品放入加去脂劑的去離子水或蒸餾水中擦洗,擦洗干凈后迅速用去離子水沖洗干凈產(chǎn)品,接著將產(chǎn)品用 5 % (體積比)的氫氟酸浸泡5分鐘或5 % 的氟化銨浸泡10分鐘,然后用去離子水沖洗干凈,并將產(chǎn)品迅速干燥。
4.不提倡石英玻璃在高溫下間歇使用。這主要是由于石英玻璃的熱膨脹系數(shù)和比重同析晶產(chǎn)物β-方石英相近。所以在高溫下連續(xù)使用時,盡管析晶區(qū)不斷擴大,但體積變化不明顯,仍可滿意地繼續(xù)使用。當析晶產(chǎn)物冷卻到 8 0 0 ^ { \circ } \mathsf { C } 時,則出現(xiàn)細小的龜裂網(wǎng)絡(luò)。繼續(xù)冷卻到200\~275C時,則出現(xiàn)方石英從高溫型到低溫型(即β-方石英到a-方石英)的結(jié)構(gòu)變化,并伴隨著發(fā)生了體積聚變。如果析晶層很深,則石英玻璃也會隨之破裂。
5.氫氟酸和 2 0 0 ^ { \circ } \mathsf { C } 熱磷酸會明顯的腐蝕石英玻璃。
1.Quartz glass is fragileand shouldbe handled withcarewhen transportedand emplaced.
2.Quartz glass is amaterial with anextremely low thermal expansion.A prouduct can crack if arapic temperaturechangeoccurewhileacomponentwithadifferentcoefficientofthermalexpansionisattached fastened,orclamped to it.
3.Devitrificationcaneasilyoccuratelevated temperature whenquartz glass iscontaminated.To those products thatarenot readyfor usein hightemperature,cleaning isneeded beforeuse.Todo this,it is recommendedtowashtheproductindeionizedordistilledwaterwithadegreasingagentadded tothe water.afterthiswashing,theproductshouldbeimmediatelyflushedwithdeionizedwaterandthenplacedin a5vol % solution of hydrofluoricacidfor5minutes,or placed ina5vol%solutionof NH4Ffor10minutes, andthenflushedagainwithdeionizedwaterand dried immediately.
4.Itisnotrecommendedtousequartzproductsatelevatedtemperatureatintervals.Thisisbecausethe expansioncoefficientanddensityofquartzglassareveryclosedtothatof β -cristobalite, the outcomeof devitrificationwhenquartzglassisusedatanelevatedtemperaturecontinuously,itcanperformwellasits cubagedoesnotchangeverymuchevenifadevirficationareaenlarges.Whentheoutcomeoff devitrificationis cooleddownto 8 0 0 ^ { \circ } { ~ C ~ } finecracknetswouldappear.When thetem-perature further decreasesto200\~275°C.thecristobalitawiththecubagechangegreatly,andinthiscase,ifadevitrification layeronaproductisverydeep,itmaybreak.
5.Hydrofluoricacidand hot phosphoricacidat 2 0 0 ^ { \circ } C erode quartz glass obviously




